DIY Semiconductor Patterning

Video Description

DIY photolithography using a direct write laser machine. This is a maskless technique (similar to projection lithography) to create patterns in a photosensitive resin (photoresist). This is a common step in many microfabrication operations like transistor/semiconductor fabrication, MEMS devices, microfluidics, etc. The advantage of maskless litho over traditional masked lithography is that you don't need to generate a mask first (which often itself requires photolithography). Maskless is faster for one-off and prototype work, but mask is superior once you need to create millions of devices. 🥰 CONSIDER SUBSCRIBING 🥰 🔬Patreon if that's your jam: https://www.patreon.com/breakingtaps ☕Or buy me a coffee? https://www.buymeacoffee.com/Breakingtaps 📢Twitter: https://twitter.com/BreakingTaps 📷Instagram: https://instagram.com/breakingtaps 💻Discord: https://discord.gg/R45uCXcEv4 ==== Links ==== - "Maker Foundry" Hackaday project: https://hackaday.io/project/25260-makerfoundry ==== Analysis Equipment ==== nGauge AFM from ICSPI (https://www.icspicorp.com/) Phenom XL SEM from Thermo Gwyddion for AFM post-processing Blender for 3D AFM rendering ==== Timeline ==== 0:00 Direct write laser lithography 1:01 Some exposed photoresist 2:06 Spatial filtering 3:59 Focus detection (unused) 5:08 Walking the beam 6:05 Galvo scanner 7:17 Scan/Tube lens 7:56 Microscope Objective and substrate 8:35 Optical Rlay Full Explanation 10:35 2x Beam Expander 11:33 Results (Datak Er-71) 12:40 Results (Microposit s1818) 16:37 Problems to fix